Overview of Big Diameter OD300mm Aluminum Nitride Disc for Semiconductor

Aluminum Nitride (AlN) ceramic is an advanced technical ceramic material known for its unique combination of extremely high thermal conductivity and excellent electrical insulation properties. Unlike traditional alumina or beryllium oxide ceramics, AlN offers a thermal conductivity close to that of metals like aluminum and copper, while still acting as a robust electrical insulator. It is typically produced via powder processing and sintering, resulting in a dense, hard, and durable material ideal for demanding thermal management applications.

Features of Big Diameter OD300mm Aluminum Nitride Disc for Semiconductor

High Thermal Conductivity: Possesses a theoretical thermal conductivity of up to 320 W/m·K, with commercial grades typically ranging from 170 to 230 W/m·K, effectively dissipating heat in high-power circuits.

Excellent Electrical Insulation: Despite its metal-like heat transfer, it maintains a high volume resistivity and dielectric strength, preventing short circuits and ensuring device safety.

Low Thermal Expansion Coefficient (CTE): Its CTE closely matches that of silicon (Si) and Silicon Carbide (SiC), minimizing thermal stress and improving reliability in semiconductor packaging.

High Mechanical Strength & Corrosion Resistance: It offers good flexural strength and is resistant to attack from many molten metals and chemicals.

Non-Toxic: AlN is a safe alternative to Beryllium Oxide (BeO) ceramics, which pose serious health risks during processing and disposal.

Specification of Big Diameter OD300mm Aluminum Nitride Disc for Semiconductor

Big Size OD300mm Aluminum Nitride Disc for Semiconductor Applications

High-Purity Product for Demanding Settings

This aluminum nitride (AlN) disc gauges 300mm in external size and satisfies the strict demands of innovative semiconductor production. It is made from high-purity AlN powder using a controlled sintering process. The outcome is a dense, uniform framework with superb thermal conductivity– commonly over 170 W/m · K. This assists handle warm successfully in high-power tools.

Precision Engineering for Regular Efficiency

Each disc is machined to tight resistances. Surface monotony stays within ± 5 µm, and density variation is kept below ± 10 µm throughout the complete size. These specifications ensure dependable get in touch with and uniform efficiency when utilized as a substratum or insulating layer in wafer handling devices. The smooth surface area coating likewise reduces particle generation, which is crucial in cleanroom setups.

Thermal and Electric Properties

Light weight aluminum nitride combines high thermal conductivity with solid electric insulation. Its dielectric toughness surpasses 15 kV/mm, making it secure for usage in high-voltage applications. The material remains stable at temperatures approximately 1,300 ° C in inert ambiences. It also has a reduced coefficient of thermal development that carefully matches silicon, minimizing stress and anxiety during thermal biking.

Tidy and Trustworthy

The discs are produced in ISO-certified cleanrooms. Every batch undergoes strenuous testing for purity, thickness, and dimensional accuracy. Trace steel pollutants like iron, nickel, and sodium are maintained below 10 ppm to prevent contamination in delicate semiconductor processes. Packaging follows ESD-safe protocols to secure the disc till it gets to the device chamber.

These OD300mm AlN discs sustain next-generation semiconductor tools that demand exceptional thermal administration, electric seclusion, and mechanical security– done in a single, trustworthy element.

Applications of Big Diameter OD300mm Aluminum Nitride Disc for Semiconductor

Applications of Big Size OD300mm Aluminum Nitride Disc in Semiconductor Production

High Thermal Conductivity for Advanced Wafer Processing

The OD300mm aluminum nitride (AlN) disc plays a key role in modern-day semiconductor manufacturing. Its huge 300mm diameter matches the dimension of common silicon wafers used today. This allows full insurance coverage and consistent support during critical fabrication steps. One significant benefit is its exceptional thermal conductivity– much greater than standard ceramic products. Heat spreads quickly and equally throughout the disc surface. This aids keep steady temperature levels throughout etching, deposition, or annealing procedures.

Electrical Insulation with Mechanical Stability

Light weight aluminum nitride is a solid electrical insulator. It stops unwanted present leak in plasma chambers and various other high-voltage environments. At the same time, it stays dimensionally stable under extreme heat and mechanical tension. The material resists warping or breaking even after repeated thermal cycles. This reliability reduces downtime and improves return in high-volume fabs.

Sanitation and Compatibility with Sensitive Processes

Semiconductor devices demand ultra-clean parts. The AlN disc meets strict purity standards. It launches marginal particles or pollutants throughout procedure. This is necessary for maintaining cleanroom problems and securing delicate wafer surface areas. The disc likewise functions well with aggressive chemistries made use of in dry etch and CVD systems. Its chemical inertness makes sure long life span without degrading efficiency.

Assistance for Next-Generation Device Scaling

As chips obtain smaller sized and a lot more complex, process control comes to be more crucial. The OD300mm AlN disc provides consistent thermal and electric habits across the whole wafer area. This uniformity supports tighter tolerances required for advanced nodes like 5nm or 3nm. Tools makers count on this component to construct extra exact and reliable handling tools. Shops utilize it to attain better film quality, fewer defects, and higher throughput.

Company Introduction

Welcome to Eduloc, a leading global supplier of high-quality ceramic grinding balls. Our product range includes,Mullite Ceramic, Quartz Ceramic, Aluminum Nitride Ceramic, Silicon Nitride Ceramic, Silicon Carbide Ceramic designed for industries such as mining, chemicals, coatings, electronics, and pharmaceuticals. We are committed to providing durable and efficient grinding solutions tailored to our customers’ diverse needs. With advanced manufacturing technology and stringent quality control, our ceramic grinding balls excel in wear resistance, corrosion resistance, and thermal stability. Partner with us for reliable products and exceptional service that enhance your production efficiency and reliability.

If you have any questions, please feel free to contact us.

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T/T, Western Union, Paypal, Credit Card etc.

Shipment Methods

By air, by sea, by express, as customers request.

5 FAQs of Big Diameter OD300mm Aluminum Nitride Disc for Semiconductor

Frequently Asked Questions: Big Diameter OD300mm Aluminum Nitride Disc for Semiconductor

What is an OD300mm Aluminum Nitride (AlN) disc used for?

This disc is a key part in semiconductor manufacturing. It works as a high-performance substrate or electrostatic chuck base. Its large 300mm diameter fits modern wafer processing tools. AlN handles high heat and keeps electrical insulation, which helps machines run smoothly during chip production.

Why choose aluminum nitride over other materials?

Aluminum nitride has excellent thermal conductivity—much better than alumina. It also insulates electricity well and resists thermal shock. These traits make it ideal for high-power and high-frequency semiconductor applications where temperature control matters most.

Is the OD300mm size standard in the industry?

Yes. The 300mm outer diameter matches today’s mainstream 300mm wafer fabs. Using this size ensures compatibility with existing equipment like etch and deposition systems. It reduces the need for custom tooling and supports high-volume production.

How is quality controlled for these discs?

Each disc goes through strict checks. We test purity, density, flatness, and surface finish. Advanced metrology tools verify dimensions to within microns. Only discs meeting SEMI standards move forward. This guarantees reliability in cleanroom environments.

Can these discs be customized?

Basic customization is possible. You can request specific thicknesses, hole patterns, or surface treatments like polishing or metallization. However, the OD300mm form factor stays fixed to maintain tool compatibility. Talk to our engineers early to confirm what options work for your process.